Campbell D K, Sweeney D W
Appl Opt. 1978 Dec 1;17(23):3727-37. doi: 10.1364/AO.17.003727.
The complexity of laser material processing can be greatly reduced using computer-generated phase reflection holographic scanners. These scanners direct and focus the beam of a carbon dioxide laser into a spot on the workpiece and then translate this spot over some general 2-D pattern as the scanner undergoes a simple 1-D motion. Procedures for constructing these scanners are presented, and the first-order aberrations introduced by them are analyzed. The primary aberrations cause the diffracted beam to focus to an astigmatic spot on the work surface. The severity of the astigmatism is proportional to the scan rate, scan angle, and f/number. A technique is presented in which the design of the scanner is adjusted so that the astigmatic image is aligned with the scan direction. The resolution perpendicular to the scan direction is the same as that of a scanner without aberrations of the same f/number. Materials processed using these scanners are presented to show their capabilities for carbon dioxide laser material processing. Power densities on the order of 10(6)/cm(2) can be readily obtained using the proposed technique.
使用计算机生成的相位反射全息扫描仪可大大降低激光材料加工的复杂性。这些扫描仪将二氧化碳激光束引导并聚焦到工件上的一个点，然后在扫描仪进行简单的一维运动时，使该点在某个通用的二维图案上移动。介绍了构建这些扫描仪的步骤，并分析了它们引入的一阶像差。主要像差会使衍射光束聚焦到工作表面上的一个像散光斑。像散的严重程度与扫描速率、扫描角度和f数成正比。提出了一种技术，通过调整扫描仪的设计，使像散图像与扫描方向对齐。垂直于扫描方向的分辨率与相同f数且无像差的扫描仪相同。展示了使用这些扫描仪加工的材料，以显示它们在二氧化碳激光材料加工方面的能力。使用所提出的技术可以轻松获得约10(6)/cm(2)的功率密度。
