Holm C
Appl Opt. 1979 Jun 15;18(12):1978-82. doi: 10.1364/AO.18.001978.
For various reasons when optical multilayer systems are constructed the thicknesses of individual layers depart from the desired values. This often results in an unacceptable performance of the filter. In this paper a production method for nonabsorbing multilayer coatings is described, which is based on monochromatic transmittance monitoring and which, to a certain degree, compensates for these errors. After the deposition of each layer a computer program is provided with the actual monitoring data from which the layer thickness is deduced. The program then reoptimizes the performance of the system by changing the thicknesses of the remaining layers. A numerical and experimental study has been made of the production of a seven-layer neutral beam splitter on glass. Theoretical data are also given for an AR coating on glass.
由于各种原因,在构建光学多层系统时,各层的厚度会偏离期望值。这常常导致滤波器性能无法接受。本文描述了一种非吸收性多层涂层的生产方法,该方法基于单色透射率监测,并且在一定程度上可以补偿这些误差。在每一层沉积之后,将实际监测数据提供给计算机程序,从中推导出层厚度。然后,该程序通过改变其余层的厚度来重新优化系统性能。对在玻璃上生产七层中性分束器进行了数值和实验研究。还给出了玻璃增透膜的理论数据。