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将二氧化钛纳米颗粒掺入通过大气压等离子体沉积的纳米厚涂层中的效果。

Effect of titanium oxide nanoparticle incorporation into nm thick coatings deposited using an atmospheric pressure plasma.

作者信息

Denis Dowling P, Barry Twomey, Gerry Byrne

机构信息

School of Electrical, Electronic and Mechanical Engineering, University College Dublin, Belfield, Dublin 4, Ireland.

出版信息

J Nanosci Nanotechnol. 2010 Apr;10(4):2746-52. doi: 10.1166/jnn.2010.1432.

Abstract

This study reports on the use of an atmospheric plasma technique to incorporate metal oxide nanoparticles into nm thick siloxane coatings. Titanium dioxide (TiO2) particles with diameters of 30-80 nm, were mixed with a number of different siloxanes-polydimethylsiloxane, hexamethyldisiloxane and tetraethylorthosilicate (TEOS). The TiO2/TEOS mixture was found to give the most stable suspension, possibly due to the higher surface tension of TEOS compared with the other siloxanes. TiO2/TEOS mixtures with 2 to 10% by weight of the metal oxide were prepared and were then nebulised into a helium/oxygen atmospheric plasma. Polyethylene terepthalate (PET) and silicon wafer substrates were passed through this plasma using a reel-to-reel substrate manipulation system. SEM combined with EDX was used to examine the distribution of the metal oxide particles in the resultant coatings. The TEOS coating thickness without TiO2 addition was 9 nm. The composite coating consisted of a relatively homogeneous distribution of small agglomerates of the TiO2 nanoparticles in TEOS. A linear increase in the titanium surface concentration was observed with increase in the quantity of TiO2 added into the siloxane precursor. The chemical functionality of the siloxane coating was examined using FTIR spectroscopy and no significant spectrum differences was observed with the incorporation of the different concentrations of TiO2 into the polymer. There were also no changes observed in coating surface energy with TiO2 incorporation. Coating morphology was examined using optical profilometry and surface roughness (Ra) values increased from typical values of 0.8 nm for the TEOS coating to 4.1 nm for the TiO2/TEOS coating. The adhesion of the deposited coatings was compared using fragmentation tests. These were carried out through uniaxial tensile loading. The coating cracking pattern after applied strain of 20% was not observed to change significantly with the addition of TiO2 into the siloxane.

摘要

本研究报告了一种利用常压等离子体技术将金属氧化物纳米颗粒掺入纳米厚硅氧烷涂层的方法。将直径为30 - 80 nm的二氧化钛(TiO₂)颗粒与多种不同的硅氧烷——聚二甲基硅氧烷、六甲基二硅氧烷和正硅酸四乙酯(TEOS)混合。发现TiO₂/TEOS混合物能产生最稳定的悬浮液,这可能是由于与其他硅氧烷相比,TEOS具有更高的表面张力。制备了含有2%至10%重量百分比金属氧化物的TiO₂/TEOS混合物,然后将其雾化到氦/氧常压等离子体中。使用卷对卷基板操纵系统使聚对苯二甲酸乙二醇酯(PET)和硅片基板通过该等离子体。结合能谱仪(EDX)的扫描电子显微镜(SEM)用于检查所得涂层中金属氧化物颗粒的分布。未添加TiO₂时,TEOS涂层厚度为9 nm。复合涂层由TiO₂纳米颗粒的小团聚体在TEOS中相对均匀的分布组成。随着添加到硅氧烷前驱体中的TiO₂量增加,观察到钛表面浓度呈线性增加。使用傅里叶变换红外光谱(FTIR)对硅氧烷涂层的化学官能团进行了检查,将不同浓度的TiO₂掺入聚合物中时未观察到明显的光谱差异。TiO₂掺入后涂层表面能也未观察到变化。使用光学轮廓仪检查涂层形态,表面粗糙度(Ra)值从TEOS涂层的典型值0.8 nm增加到TiO₂/TEOS涂层的4.1 nm。使用破碎试验比较了沉积涂层的附着力。这些试验通过单轴拉伸加载进行。在硅氧烷中添加TiO₂后,施加20%应变后涂层的开裂模式未观察到明显变化。

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