State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000, China.
ACS Appl Mater Interfaces. 2010 Mar;2(3):788-94. doi: 10.1021/am900788t.
Fast development of micro/nanoelectromechanical systems (MEMS/NEMS) and high-density storage technology (HDT) have stimulated the development of new materials that require hydrophobic surfaces with low adhesion and friction. Micro/nanohierarchical structures and chemical modification are two useful methods for improving nanotribological properties of mechanical components. In this study, Au surfaces with micro/nanohierarchical structures were prepared by replication of micropatterened silicon surfaces using PDMS and self-assembly of alkanethiol [CH(3)(CH(2))(9)SH] to create hydrophobic micro/nanohierarchical structures and to improve nanotribological properties of MEMS/NEMS. The effects of nanoscaled roughness (including pillar height and pillar fractional surface coverage) and chemical modification on the wetting and nanotribological properties of surfaces were systemically investigated. Results show that with the increasing of nanoscale roughness and lowering of surface energy, the surface becomes more hydrophobic, and the adhesive force and friction force are reduced greatly.
微纳机电系统（MEMS/NEMS）和高密度存储技术（HDT）的快速发展刺激了对具有低附着力和低摩擦力的疏水表面的新材料的需求。微纳分级结构和化学修饰是改善机械部件的纳摩擦学性能的两种有效方法。在这项研究中，通过复制具有微图案的硅表面，使用 PDMS 制备了具有微纳分级结构的 Au 表面，并通过烷硫醇[CH(3)(CH(2))(9)SH]的自组装，形成了疏水性微纳分级结构，从而提高了 MEMS/NEMS 的纳摩擦学性能。系统地研究了纳米级粗糙度（包括支柱高度和支柱分面覆盖率）和化学修饰对表面润湿性和纳摩擦学性能的影响。结果表明，随着纳米级粗糙度的增加和表面能的降低，表面变得更加疏水，粘附力和摩擦力大大降低。
