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脉冲激光沉积过程中表面扩散率和粗化的测量。

Measurements of surface diffusivity and coarsening during pulsed laser deposition.

机构信息

Department of Materials Science and Engineering, Cornell University, Ithaca, New York 14853, USA.

出版信息

Phys Rev Lett. 2009 Dec 18;103(25):256103. doi: 10.1103/PhysRevLett.103.256103.

Abstract

Pulsed laser deposition (PLD) of homoepitaxial SrTiO(3) 001 was studied with in situ x-ray specular reflectivity and surface diffuse x-ray scattering. Unlike prior reflectivity-based studies, these measurements access both time and length scales of the evolution of the surface morphology during growth. In particular, we show that this technique allows direct measurements of the diffusivity for both inter- and intralayer transport. Our results explicitly limit the possible role of island breakup, demonstrate the key roles played by nucleation and coarsening in PLD, and place an upper bound on the Ehrlich-Schwoebel barrier for downhill interlayer diffusion.

摘要

采用原位掠入射 X 射线反射率和表面漫散射 X 射线散射技术研究了 SrTiO3(001)同质外延的脉冲激光沉积。与之前基于反射率的研究不同,这些测量方法可以同时获取生长过程中表面形貌演变的时间和长度尺度。特别是,我们表明,该技术允许直接测量层间和层内输运的扩散系数。我们的结果明确限制了岛状破裂的可能作用,证明了成核和粗化在 PLD 中的关键作用,并对沿层向下扩散的 Ehrlich-Schwoebel 势垒施加了上限。

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