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刻蚀硅纳米线表面的银包裹铂核壳纳米结构:原子层沉积(ALD)工艺及其在 SERS 中的应用。

Silver coated platinum core-shell nanostructures on etched Si nanowires: atomic layer deposition (ALD) processing and application in SERS.

机构信息

Max Planck Institute of Microstructure Physics, Weinberg 2, 06120 Halle, Germany.

出版信息

Chemphyschem. 2010 Jun 21;11(9):1995-2000. doi: 10.1002/cphc.201000115.

Abstract

A new method to prepare plasmonically active noble metal nanostructures on large surface area silicon nanowires (SiNWs) mediated by atomic layer deposition (ALD) technology has successfully been demonstrated for applications of surface-enhanced Raman spectroscopy (SERS)-based sensing. As host material for the plasmonically active nanostructures we use dense single-crystalline SiNWs with diameters of less than 100 nm as obtained by a wet chemical etching method based on silver nitrate and hydrofluoric acid solutions. The SERS active metal nanoparticles/islands are made from silver (Ag) shells as deposited by autometallography on the core nanoislands made from platinum (Pt) that can easily be deposited by ALD in the form of nanoislands covering the SiNW surfaces in a controlled way. The density of the plasmonically inactive Pt islands as well as the thickness of noble metal Ag shell are two key factors determining the magnitude of the SERS signal enhancement and sensitivity of detection. The optimized Ag coated Pt islands on SiNWs exhibit great potential for ultrasensitive molecular sensing in terms of high SERS signal enhancement ability, good stability and reproducibility. The plasmonic activity of the core-shell Pt//Ag system that will be experimentally realized in this paper as an example was demonstrated in numerical finite element simulations as well as experimentally in Raman measurements of SERS activity of a highly diluted model dye molecule. The morphology and structure of the core-shell Pt//Ag nanoparticles on SiNW surfaces were investigated by scanning- and transmission electron microscopy. Optimized core-shell nanoparticle geometries for maximum Raman signal enhancement is discussed essentially based on the finite element modeling.

摘要

一种通过原子层沉积(ALD)技术在大面积硅纳米线(SiNWs)上制备等离子体活性贵金属纳米结构的新方法已成功应用于表面增强拉曼光谱(SERS)传感。作为等离子体活性纳米结构的宿主材料,我们使用了通过基于硝酸银和氢氟酸溶液的湿法化学蚀刻方法获得的直径小于 100nm 的密集单晶 SiNWs。SERS 活性金属纳米粒子/岛由通过自组装在由 ALD 以纳米岛形式沉积的核纳米岛上沉积的银(Ag)壳制成,该纳米岛以受控的方式覆盖 SiNW 表面。等离子体非活性 Pt 岛的密度以及贵金属 Ag 壳的厚度是决定 SERS 信号增强幅度和检测灵敏度的两个关键因素。在 SiNW 上优化的 Ag 涂覆 Pt 岛在超灵敏分子传感方面具有很大的潜力,因为它们具有高 SERS 信号增强能力、良好的稳定性和可重复性。本文将作为一个示例实验实现的核壳 Pt//Ag 系统的等离子体活性在数值有限元模拟中以及在高度稀释的模型染料分子的 SERS 活性的拉曼测量中得到了实验验证。通过扫描和透射电子显微镜研究了 SiNW 表面上核壳 Pt//Ag 纳米粒子的形态和结构。根据有限元建模,主要讨论了用于最大拉曼信号增强的优化核壳纳米粒子几何形状。

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