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气体激光相互作用模型:在热激活激光诱导化学气相沉积中的应用。

Model for gas-laser interaction: application to thermally activated laser-induced chemical vapor deposition.

作者信息

Pan E T, Flint J H, Liang J M, Adler D, Haggerty J S

出版信息

Appl Opt. 1987 Jan 1;26(1):70-5. doi: 10.1364/AO.26.000070.

DOI:10.1364/AO.26.000070
PMID:20454077
Abstract

We present a model for the interaction between a laser and gas mixture that can be directly applied to the case of thermally activated laser-induced chemical vapor deposition (LICVD). The model involves the values of specific parameters, particularly gas pressure, laser intensity, detuning frequency, and rotational and vibrational relaxation rates, relevant to absorption, saturation, and heat-transfer processes and their interrelation. We adopt a semiclassical phenomenological approach, considering vibrational energy levels with accompanying rotational energy manifolds and both radiative and nonradiative transition processes. The model is applied to the experimental NH(3) absorption results at the R(6), R(14), and P(20) lines of a cw CO(2) laser in the 10-microm region.

摘要

我们提出了一种激光与气体混合物相互作用的模型,该模型可直接应用于热激活激光诱导化学气相沉积(LICVD)的情况。该模型涉及特定参数的值,特别是与吸收、饱和及传热过程及其相互关系相关的气压、激光强度、失谐频率以及转动和振动弛豫率。我们采用半经典唯象方法,考虑具有伴随转动能量流形的振动能级以及辐射和非辐射跃迁过程。该模型应用于连续波CO₂激光在10微米区域的R(6)、R(14)和P(20)谱线处的NH₃吸收实验结果。

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