Energy and Environment Research Laboratories, Industrial Technology and Research Institute, Hsinchu, Taiwan, Republic of China.
J Air Waste Manag Assoc. 2010 May;60(5):629-35. doi: 10.3155/1047-3289.60.5.629.
The hydride gas of phosphine (PH3) is commonly used for semiconductor and optoelectronic industries. The local scrubbers must immediately abate it because of its high toxicity. In this study, copper (Cu) loaded on the sol-gel-derived gamma-alumina (Al2O3) adsorbents are prepared and tested to investigate the possibility of PH3 removal and sorbent regeneration. Test results showed that during the breakthrough time of over 99% PH3 removal efficiency, the maximum adsorption capacity of Cu loaded on the sol-gel-derived gamma-Al2O3 adsorbent is 18 mg-PH3/g-adsorbent. This is much higher than that of Cu loaded on the commercial gamma-Al2O3 adsorbent--8.6 mg-PH3/g-adsorbent. The high specific surface area, narrow pore size distribution, and well dispersion of Cu loaded on the sol-gel-derived gamma-Al2O3 could be the reasons for its high PH3 adsorption capacity. The regeneration test shows that Cu loaded on the sol-gel-derived gamma-Al2O3 adsorbent can be regenerated after a simple air purging procedure. The cumulative adsorption capacity for five regeneration cycles is 65 mg-PH3/g-adsorbent, which is approximately double that of the Cu/zeolite adsorbent demonstrated in the literature.
磷化氢（PH3）的氢化物气体通常用于半导体和光电行业。由于其高毒性，当地的洗涤器必须立即加以抑制。在这项研究中，制备并测试了负载在溶胶-凝胶衍生的γ-氧化铝（Al2O3）吸附剂上的铜（Cu），以研究去除 PH3 和吸附剂再生的可能性。测试结果表明，在超过 99% PH3 去除效率的穿透时间内，负载在溶胶-凝胶衍生的γ-Al2O3 吸附剂上的 Cu 的最大吸附容量为 18mg-PH3/g-吸附剂。这远高于负载在商业γ-Al2O3 吸附剂上的 Cu 的吸附容量（8.6mg-PH3/g-吸附剂）。负载在溶胶-凝胶衍生的γ-Al2O3 上的 Cu 具有高比表面积、窄孔径分布和良好的分散性，这可能是其具有高 PH3 吸附容量的原因。再生测试表明，负载在溶胶-凝胶衍生的γ-Al2O3 吸附剂上的 Cu 可以通过简单的空气吹扫程序进行再生。五个再生循环的累积吸附容量为 65mg-PH3/g-吸附剂，约为文献中展示的 Cu/沸石吸附剂的两倍。
