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一种用于材料微纳结构化的集成拉曼显微镜的飞秒激光放大系统。

An amplified femtosecond laser system for material micro-/nanostructuring with an integrated Raman microscope.

作者信息

Zalloum Othman H Y, Parrish Matthew, Terekhov Alexander, Hofmeister William

机构信息

The University of Tennessee Space Institute, 411 B.H. Goethert Parkway, Tullahoma, Tennessee 37388, USA.

出版信息

Rev Sci Instrum. 2010 May;81(5):053906. doi: 10.1063/1.3430073.

Abstract

In order to obtain new insights into laser-induced chemical material modifications, we introduce a novel combined approach of femtosecond pulsed laser-direct writing and in situ Raman microscopy within a single experimental apparatus. A newly developed scanning microscope, the first of its kind, provides a powerful tool for micro-/nanomachining and characterization of material properties and allows us to relate materials' functionality with composition. We address the issues of light delivery to the photomodification site and show the versatility of the system using tight focusing. Amplified femtosecond pulses are generated by a Ti:sapphire laser oscillator and a chirped-pulse regenerative amplifier, both pumped by a diode-pumped frequency doubled neodymium-doped yttrium orthovanadate (Nd:YVO(4)) laser operating at 532 nm. Results of Raman spectroscopy and scanning electron microscopy images of femtosecond laser micro-/nanomachining on the surface and in the bulk of single-crystal diamond obtained from first trials of this instrument are also presented. This effective combination could help to shed light on the influence of the local structure fluctuations on controllability of the laser processing and the role of the irradiation in the ablation processes ruling out possible imprecisions coming from the use of the two independent techniques.

摘要

为了深入了解激光诱导的化学材料改性,我们在单个实验装置中引入了一种飞秒脉冲激光直写与原位拉曼显微镜相结合的新方法。一种新开发的扫描显微镜,此类中的首个,为微纳加工以及材料特性表征提供了一个强大工具,并使我们能够将材料的功能与其成分联系起来。我们解决了光传输到光改性部位的问题,并展示了使用紧密聚焦时该系统的多功能性。放大的飞秒脉冲由钛宝石激光振荡器和啁啾脉冲再生放大器产生,二者均由工作在532 nm的二极管泵浦倍频掺钕正钒酸钇(Nd:YVO₄)激光器泵浦。还展示了从该仪器的首次试验中获得的飞秒激光在单晶金刚石表面和内部进行微纳加工的拉曼光谱结果以及扫描电子显微镜图像。这种有效的结合有助于阐明局部结构波动对激光加工可控性的影响以及辐照在排除使用两种独立技术可能产生的不精确性的烧蚀过程中的作用。

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