Department of Electrical Engineering and Computer Science, University of Kassel,D-34109 Kassel, Germany.
Opt Lett. 2010 Jun 1;35(11):1768-70. doi: 10.1364/OL.35.001768.
Although white-light interferometers have become well-established tools for measuring smooth, rough, and microstructured surfaces, there are some limitations in certain applications, e.g., if tilted surface areas or small radii of curvature are to be measured. Since the correction of chromatic aberrations is not perfect over the total field of view or the total pupil plane, dispersion differences occur for different ray paths of the microscopic imaging system. The influence of these effects is discussed on the basis of the most commonly used Mirau interferometer, and the resulting systematic measuring errors are explained.
虽然白光干涉仪已经成为测量光滑、粗糙和微结构表面的成熟工具，但在某些应用中仍存在一些限制，例如，如果要测量倾斜表面区域或小曲率半径。由于在整个视场或整个光瞳面上对色差的校正并不完美，因此对于微观成像系统的不同光线路径会出现色散差异。本文基于最常用的 Mirau 干涉仪讨论了这些影响，并解释了由此产生的系统测量误差。
