Glenn P, Reid P, Slomba A, Van Speybroeck L P
Appl Opt. 1988 Apr 15;27(8):1539-43. doi: 10.1364/AO.27.001539.
We have developed a math model relating the measured parameters of the Technology Mirror Assembly (TMA) to its final performance. This scalar scattering model is valid for large and small amplitude features. It allows the user to specify power spectral densities and/or autocovariance functions within any spatial bandwidth, including microroughness. We present new TMA data in the bandwidth of ~0.1-1000 mm(-1), predicting performance and comparing them with x-ray test data. We also account for assembly, alignment. and particulate contamination. Finally, we comment on improved performance expected after repolishing.
我们已经开发出一种数学模型,该模型将技术镜组件(TMA)的测量参数与其最终性能相关联。这种标量散射模型对大振幅和小振幅特征均有效。它允许用户在任何空间带宽内指定功率谱密度和/或自协方差函数,包括微观粗糙度。我们展示了在约0.1 - 1000毫米⁻¹带宽内的新TMA数据,预测性能并将其与X射线测试数据进行比较。我们还考虑了装配、对准和颗粒污染。最后,我们对重新抛光后预期的性能提升进行了评论。