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使用140万像素探测器阵列进行全息轮廓和变形测量。

Holographic contour and deformation measurement using a 1.4 million element detector array.

作者信息

Creath K

出版信息

Appl Opt. 1989 Jun 1;28(11):2170-5. doi: 10.1364/AO.28.002170.

Abstract

Holographic interferometry enables the measurement of object deformations due to stress induced by pressure, heat, or applied force and the measurement of surface shape. Real-time double-exposure holographic interferometry and phase-measurement interferometry have been combined to measure both static changes in objects and their shape. However, the number of detector points available has limited the number of fringes which can be measured. This paper shows results of measurements using a Videk Megaplus camera with 1320 x 1035 detector elements to enable measurements with high fringe densities. Results of measurement of object deformation and object shape show wavefronts with fringe densities up to 500 fringes per diameter can be measured with an rms repeatability of lambda/50.

摘要

全息干涉测量法能够测量由于压力、热或外力引起的应力导致的物体变形以及表面形状。实时双曝光全息干涉测量法和相位测量干涉测量法已被结合起来用于测量物体的静态变化及其形状。然而,可用的探测器点数限制了能够测量的条纹数量。本文展示了使用具有1320×1035个探测器元件的Videk Megaplus相机进行测量的结果,以便能够进行高条纹密度的测量。物体变形和物体形状的测量结果表明,可以测量条纹密度高达每直径500条条纹的波前,均方根重复性为λ/50。

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