Baba T, Kokubun Y
Appl Opt. 1990 Jun 20;29(18):2781-92. doi: 10.1364/AO.29.002781.
The dispersion characteristics and radiation loss characteristics of ARROW (antiresonant reflecting optical waveguide), a novel single-mode slab waveguide, are analyzed in detail. The mechanism by which the waveguide produces a large amount of light radiation from the waveguide core to the semiconductor substrate is explained and some approximate formulas of propagation characteristics are obtained, which are useful for the design of ARROW. Two novel integrated structures of ARROW and photodetector are proposed to realize high coupling efficiency from waveguide to photodetector, small device size, and easy fabrication process. In these structures, an antireflecting (AR) layer is introduced to greatly enhance coupling efficiency. Their performance is discussed compared with the conventional waveguide structure. It is shown theoretically and experimentally that a high coupling efficiency (>90%) is achievable with short detector length in the ARROW structures.
详细分析了一种新型单模平板光波导——抗谐振反射光波导（ARROW）的色散特性和辐射损耗特性。解释了该光波导从波导芯向半导体衬底产生大量光辐射的机制，并得到了一些传播特性的近似公式，这些公式对ARROW的设计很有用。提出了两种新型的ARROW与光电探测器的集成结构，以实现从光波导到光电探测器的高耦合效率、小器件尺寸和易于制造的工艺。在这些结构中，引入了抗反射（AR）层以大大提高耦合效率。与传统光波导结构相比，讨论了它们的性能。理论和实验表明，在ARROW结构中，采用短探测器长度可实现高耦合效率（>90%）。
