Yin D, Schmidt Holger, Barber J, Hawkins A
Opt Express. 2004 Jun 14;12(12):2710-5. doi: 10.1364/opex.12.002710.
We report the design, fabrication, and demonstration of antiresonant reflecting optical (ARROW) waveguides with hollow cores. We describe the design principles to achieve low waveguide loss in both transverse and lateral directions. A novel fabrication process using silicon dioxide and silicon nitride layers as well as sacrificial polyimide core layers was developed. Optical characterization of 3.5mum thick waveguides with air cores was carried out. We demonstrate single-mode propagation through these hollow ARROW waveguides with propagation loss as low as 6.5cm-1 and mode cross sections down to 6.7mum2. Applications of these waveguides to sensing and quantum communication are discussed.
我们报告了具有空心芯的反谐振反射光学（ARROW）波导的设计、制造和演示。我们描述了在横向和侧向实现低波导损耗的设计原理。开发了一种使用二氧化硅和氮化硅层以及牺牲性聚酰亚胺芯层的新颖制造工艺。对具有空气芯的3.5微米厚波导进行了光学表征。我们展示了通过这些空心ARROW波导的单模传播，其传播损耗低至6.5厘米-1，模式横截面低至6.7微米2。讨论了这些波导在传感和量子通信中的应用。
