Wan D S, Lin D T
Appl Opt. 1990 Aug 1;29(22):3255-65. doi: 10.1364/AO.29.003255.
To fully interpret the Ronchigram, a good automatic phase reduction algorithm is necessary. A new phase reduction algorithm, originally designed for interferometry test of large optics, is presented for the Ronchi test. Due to the common path property, only two Ronchigrams shifted by pi/2 are necessary for the reproducing phase. Accuracy can be better than one-thirtieth of the grating space. Methods are suggested for finding spherical aberration and astigmatism without integrating the phase using the Ronchi test. Tests of results using the new algorithm show good agreement with typical interferometry tests.
为了全面解读泰曼光栅图，需要一种良好的自动相位还原算法。本文提出了一种最初为大型光学元件干涉测量测试设计的新相位还原算法，用于泰曼测试。由于共光路特性，再现相位仅需两张相位相差π/2的泰曼光栅图。精度可优于光栅间距的三十分之一。文中还提出了在不使用泰曼测试对相位进行积分的情况下寻找球差和像散的方法。使用新算法的测试结果与典型干涉测量测试结果吻合良好。
