Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA.
Opt Lett. 2010 Aug 1;35(15):2615-7. doi: 10.1364/OL.35.002615.
Volume x-ray gratings consisting of a multilayer coating deposited on a blazed substrate can diffract with very high efficiency, even in high orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property, however, depends critically on the ability to create a structure with near atomic perfection. In this Letter we report on a method to produce these structures. We report measurements that show, for a 5000l/mm grating diffracting in the third order, a diffraction efficiency of 37.6% at a wavelength of 13.6nm. This work now shows a direct route to achieving high diffraction efficiency in high order at wavelengths throughout the soft x-ray energy range.
体全息 x 射线光栅由沉积在闪耀衬底上的多层膜组成，如果同时满足面内（光栅）和离面（布拉格多层）衍射条件，即使在高次也能以非常高的效率进行衍射。然而，这种显著的特性严重依赖于近乎原子完美的结构的制造能力。在本信中，我们报告了一种制造这些结构的方法。我们报告的测量结果表明，在波长为 13.6nm 时，对于 5000l/mm 的三阶衍射光栅，衍射效率为 37.6%。这项工作现在为在整个软 x 射线能量范围内的高次实现高衍射效率提供了一条直接途径。
