Matsumoto T, Kitagawa Y, Adachi M, Minemoto T
Appl Opt. 1991 Aug 1;30(22):3205-9. doi: 10.1364/AO.30.003205.
A new method is proposed for profile measurements using a right-angle prism. With this method, the distance to an object surface is measured by using triangulation based on a change of the critical angle of total reflection. An object surface is illuminated by a scanning laser beam and the incident angle of the scattered light into the prism is measured using the change in the critical angle. Three-dimensional profiles of objects with rough surfaces can be measured with high accuracy.
提出了一种使用直角棱镜进行轮廓测量的新方法。利用这种方法，基于全反射临界角的变化，通过三角测量法来测量到物体表面的距离。用扫描激光束照射物体表面，并利用临界角的变化来测量散射光进入棱镜的入射角。可以高精度地测量具有粗糙表面的物体的三维轮廓。
