用于距离测量的双正弦相位调制激光二极管干涉仪。

Double sinusoidal phase-modulating laser diode interferometer for distance measurement.

作者信息

Sasaki O, Yoshida T, Suzuki T

出版信息

Appl Opt. 1991 Sep 1;30(25):3617-21. doi: 10.1364/AO.30.003617.

DOI:10.1364/AO.30.003617

PMID:20706435

Abstract

Sinusoidal phase-modulating interferometry is used to detect exactly the sinusoidal phase variation of an interference signal even when the amplitude of the interference signal is varied by modulation of the injection current. We can easily provide a sinusoidal phase-modulating interferometer with a feedback control system that eliminates the phase fluctuations caused by mechanical vibrations. The methods using sinusoidal phase-modulating interferometry improve the resolution of distance measurements. Experimental results show that the thickness of gauge blocks is measured with a resolution of approximately 0.5 microm.

摘要

即使通过注入电流调制使干涉信号的幅度发生变化，正弦相位调制干涉测量法也能精确检测干涉信号的正弦相位变化。我们可以轻松地为正弦相位调制干涉仪配备一个反馈控制系统，该系统能够消除由机械振动引起的相位波动。使用正弦相位调制干涉测量法的这些方法提高了距离测量的分辨率。实验结果表明，量块厚度的测量分辨率约为0.5微米。