Bremer J, Hunderi O, Fanping K, Skauli T, Wold E
Appl Opt. 1992 Feb 1;31(4):471-8. doi: 10.1364/AO.31.000471.
An automatic infrared ellipsometer for the study of surface and interface phenomena has been constructed. The system is based on a Fourier transform spectrometer that we equipped with an ellipsometer unit. Polarizers and analyzers are of the ion-etched wire-grid type. Their rotation is governed by means of a computer-controlled stepping-motor system. A discussion of calibration procedures for the infrared range is given, and special attention is given to the problem of selecting the best measurement strategy. The polarization state of the reflected beam is determined by measuring the intensity at 72 regularly spaced polarizer/analyzer settings. It is found that the effects of interferometric polarization, beam wandering, and detector dichroism cannot be neglected. However, these error sources have been eliminated by analyzing the zeroth, second, and fourth harmonic components of the azimuthally recorded intensity. Both the multiplex advantage of Fourier transform spectroscopy and the phase sensitivity ofellipsometry are combined in this instrument. Measurements on superconducting films, superlattices, and doped GaAs films are reported.
我们构建了一台用于研究表面和界面现象的自动红外椭圆偏振仪。该系统基于一台我们配备了椭圆偏振仪单元的傅里叶变换光谱仪。偏振器和分析器为离子蚀刻线栅型。它们的旋转由计算机控制的步进电机系统驱动。给出了红外波段校准程序的讨论，并特别关注了选择最佳测量策略的问题。通过在72个等间距的偏振器/分析器设置下测量强度来确定反射光束的偏振态。发现干涉偏振、光束漂移和探测器二向色性的影响不可忽略。然而，通过分析方位记录强度的零阶、二阶和四阶谐波分量消除了这些误差源。该仪器兼具傅里叶变换光谱学的多路复用优势和椭圆偏振测量的相位敏感性。报道了对超导薄膜、超晶格和掺杂砷化镓薄膜的测量。
