Method of multiple references for 3D imaging with Fourier transform interferometry.

This letter presents an improved phase referencing technique, called Method of Multiple References, for optical profilometry. Based on a lookup table, the method eliminates several major drawbacks of single-reference Fourier Transform Interferometry by enabling surface error correction for steep slopes and step discontinuities, and by allowing mapping of multiple discrete objects using a single image set. The algorithm is tested using a fiber optic coupler-based FTI system and shown to have RMS surface error less than 0.03 mm.