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Bi(12)SiO(20) thin-film spatial light modulator.

作者信息

Nagao Y, Sakata H, Mimura Y

出版信息

Appl Opt. 1992 Jul 10;31(20):3966-70. doi: 10.1364/AO.31.003966.

Abstract

A thin-film spatial light modulator that uses an epitaxial film of Bi(12)SiO(20) has been developed. By using a thin epitaxial film as a sensing, storing, and modulating layer, we can attain high resolution of 27 line pairs/mm at 50% modulation. In addition, a novel device structure that adopts a low resistivity substrate enables this device to be erased quickly only by bias voltage switching.

摘要

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