质子交换铌酸锂（LiNbO₃）波导：退火过程中大气环境的影响

Proton-exchanged LiNbO(3) waveguides: relevance of atmospheric environment during annealing.

作者信息

Loni A, De La Rue R M

出版信息

Appl Opt. 1992 Aug 20;31(24):5096-8. doi: 10.1364/AO.31.005096.

DOI:10.1364/AO.31.005096

PMID:20733678

Abstract

The relevance of the type of atmosphere used during the annealing of proton-exchanged LiNbO(3) planar waveguides is discussed. The experimental evidence, based on a comparison of the refractive-index profiles of waveguides annealed under wet O(2), dry O(2), or ambient atmospheres, with various gas flow rates, suggests that the atmosphere type does not influence the properties of the resulting waveguide.

摘要

讨论了质子交换LiNbO(3)平面波导退火过程中所用气氛类型的相关性。基于对在湿O(2)、干O(2)或环境气氛下退火且具有不同气体流速的波导折射率分布的比较，实验证据表明气氛类型不会影响所得波导的性能。