Department of Mechanical Engineering, Pohang University of Science and Technology, San 31, Hyojadong Namgu, Pohang, Kyungbuk 790-784, South Korea.
J Acoust Soc Am. 2010 Sep;128(3):1033-44. doi: 10.1121/1.3467757.
A micro-machined underwater acoustic receiver that utilizes the flexural vibration mode of a silicon thin plate and piezoelectric transduction material was investigated. In particular, air was used as the backing material for the hydrophone in order to improve sensitivity in the audible frequency range. To evaluate the effects of air backing on receiving sensitivity, a transduction model incorporating mechanical/electrical/acoustical design parameters was used in designing a piezoelectric micro-machined hydrophone. The sensitivity and displacement responses of the sensor were simulated using the model for air backing and water backing cases, and the benefit of using air backing to enhance sensitivity was confirmed. The micro-machined piezoelectric transducer was fabricated, assembled in the shape of a hydrophone, and tested to ascertain its characteristics as an underwater sensor. These characteristics, such as frequency response and sensitivity, were measured and compared with the simulated results.
研究了一种利用硅薄膜的弯曲振动模式和压电转换材料的微机械水下声接收器。特别地，为了提高在可听频率范围内的灵敏度，将空气用作水听器的背衬材料。为了评估空气背衬对接收灵敏度的影响，在设计压电微机械水听器时使用了结合机械/电气/声学设计参数的转换模型。使用该模型模拟了空气背衬和水背衬两种情况下传感器的灵敏度和位移响应，并证实了使用空气背衬来提高灵敏度的好处。制造了微机械压电换能器，将其组装成水听器的形状，并进行测试以确定其作为水下传感器的特性。测量并比较了这些特性，如频率响应和灵敏度，与模拟结果。
