Vasey F, Reinhart F K, Houdré R, Stauffer J M
Appl Opt. 1993 Jun 20;32(18):3220-32. doi: 10.1364/AO.32.003220.
A passive spatial light beam deflector based on a channel waveguide phased-array concept is presented. Diffraction gratings patterned by electron-beam lithography couple light into and out of the device. Phasing is achieved electro-optically with indium tin oxide/AlGaAs Shottky junctions. Discrete beam steering is first demonstrated with a 43-element rib waveguide array at an 850-nm wavelength. A sawtooth electrode keeps the device length short and the electrode surface small. Continuous deflection over a ±7.2 mrad range at a 900-nm wavelength is then reported. A set of seven sawtooth and offset electrodes permits addressing any point within this range. The beam has a width of 1.5 mrad, and the maximum modulation voltage is -8.5 V.
提出了一种基于通道波导相控阵概念的无源空间光束偏转器。通过电子束光刻图案化的衍射光栅将光耦合进和耦合出该器件。利用氧化铟锡/砷化铝镓肖特基结实现电光相位控制。首先在850纳米波长下用一个43元肋状波导阵列演示了离散光束转向。一个锯齿形电极使器件长度较短且电极表面较小。随后报道了在900纳米波长下在±7.2毫弧度范围内的连续偏转。一组七个锯齿形和偏移电极允许寻址该范围内的任何点。光束宽度为1.5毫弧度，最大调制电压为 -8.5伏。
