Jeon Yunseong, Hong Chung Ki
Department of Physics, Pohang University of Science and Technology, Pohang, 790-784, Korea.
Appl Opt. 2010 Sep 20;49(27):5110-6. doi: 10.1364/AO.49.005110.
A new method of optical imaging that can generate the section images of arbitrarily tilted planes has been developed from illumination-angle-scanning digital interference holography. A set of complex object fields are reconstructed from the holograms captured as the illumination angle is varied with uniform intervals. After the complex fields are modified with phase ramps that match the tilt (relative to the hologram plane) of a desired observation plane, the image of the object sliced along the tilted plane is obtained from their superposition. The axial resolution of a system employing this method is measured with a step height standard, and it is applied to the tomographic inspection of a microelectromechanical system.
一种基于照明角度扫描数字干涉全息术开发的新型光学成像方法，可以生成任意倾斜平面的截面图像。随着照明角度以均匀间隔变化，从捕获的全息图中重建出一组复物体场。在用与所需观察平面相对于全息图平面的倾斜度相匹配的相位斜坡对复场进行修改之后，通过它们的叠加获得沿倾斜平面剖切的物体图像。采用该方法的系统的轴向分辨率用台阶高度标准进行测量，并将其应用于微机电系统的层析成像检测。
