Soft-x-ray projection lithography experiments using Schwarzschild imaging optics.

作者信息

Tichenor D A, Kubiak G D, Malinowski M E, Stulen R H, Haney S J, Berger K W, Brown L A, Sweatt W C, Bjorkholm J E, Freeman R R, Himel M D, Macdowell A A, Tennant D M, Wood R, Bokor J, Jewell T E, Mansfield W M, Waskiewicz W K, White D L, Windt D L

出版信息

Appl Opt. 1993 Dec 1;32(34):7068-71. doi: 10.1364/AO.32.007068.

DOI:10.1364/AO.32.007068

PMID:20856569

Abstract

Soft-x-ray projection imaging is demonstrated by the use of 14-nm radiation from a laser plasma source and a single-surface multilayer-coated ellipsoidal condenser. Aberrations in the condenser and the Schwarzschild imaging objective are characterized and correlated with imaging performance. A new Schwarzschild housing, designed for improved alignment stability, is described.

摘要