UEKAE, National Research Institute of Electronics and Cryptology, Kocaeli, Turkey.
Nanotechnology. 2010 Oct 29;21(43):435701. doi: 10.1088/0957-4484/21/43/435701. Epub 2010 Sep 29.
Silicon (Si) nanoparticles (NPs) were synthesized by transforming a Si wafer surface to ammonium silicon hexafluoride (ASH) or (NH(4))(2)SiF(6) under acid vapor treatment. Si-NPs which were found to be embedded within the polycrystalline (ASH) layer exhibit a strong green-orange photoluminescence (PL). Differential PL measurements revealed a major double component spectrum consisting of a broad band associated with the ASH-Si wafer interfacial porous oxide layer and a high energy band attributable to Si-NPs embedded in the ASH. The origin of the latter emission can be explained in terms of quantum/spatial confinement effects probably mediated by oxygen related defects in or around Si-NPs. Although Si-NPs are derived from the interface they are much smaller in size than those embedded within the interfacial porous oxide layer (SiO(x), x > 1.5). Transmission electron microscopy (TEM) combined with Raman scattering and Fourier transformed infrared (FTIR) analysis confirmed the presence of Si-NP and Si-O bondings pointing to the role of oxygen related defects in a porous/amorphous structure. The presence of oxygen of up to 4.5 at.% in the (NH(4))(2)SiF(6) layer was confirmed by energy dispersive spectroscopy (EDS) analysis.
硅(Si)纳米粒子(NPs)是通过在酸蒸气处理下将硅片表面转化为六氟硅铵(ASH)或(NH4)2SiF6来合成的。在多晶(ASH)层中发现的 Si-NPs 表现出强烈的绿橙色光致发光(PL)。差示 PL 测量显示出主要的双分量光谱,由与 ASH-Si 晶片界面多孔氧化物层相关的宽带和归因于嵌入 ASH 中的 Si-NPs 的高能带组成。后者发射的起源可以用量子/空间限制效应来解释,这可能是由 Si-NPs 中的或周围的氧相关缺陷介导的。尽管 Si-NPs 源自界面,但它们的尺寸比嵌入界面多孔氧化物层(SiOx,x > 1.5)中的 Si-NPs 小得多。透射电子显微镜(TEM)结合拉曼散射和傅里叶变换红外(FTIR)分析证实了 Si-NP 和 Si-O 键的存在,这表明氧相关缺陷在多孔/非晶结构中起作用。通过能谱分析(EDS)分析证实了(NH4)2SiF6层中氧的存在高达 4.5 at.%。