Chindaudom P, Vedam K
Appl Opt. 1994 May 1;33(13):2664-71. doi: 10.1364/AO.33.002664.
By incorporation of an achromatic three-reflection quarterwave retarder to a spectroscopic ellipsometer and application of appropriate calibration and error correction procedures, it has been possible to characterize real thin-film fluoride optical coatings that are inhomogeneous. The refractive index and its dispersion with wavelengths greater than 300-700 nm as well as the depth profile of voids in the film have been determined for AlF(3), CeF(3), HfF(4), LaF(3), ScF(3) and YF(3) films on vitreous silica substrates.
通过将消色差三反射四分之一波片集成到光谱椭偏仪中,并应用适当的校准和误差校正程序,得以对不均匀的实际薄膜氟化物光学涂层进行表征。已测定了在石英玻璃衬底上的AlF(3)、CeF(3)、HfF(4)、LaF(3)、ScF(3)和YF(3)薄膜在波长大于300 - 700 nm时的折射率及其色散,以及薄膜中空隙的深度分布。