Park Y C, Kim S W
Appl Opt. 1994 Aug 1;33(22):5171-6. doi: 10.1364/AO.33.005171.
We investigate the moiré fringe pattern of two concentric-circle gratings with the aim of measuring the relative two-dimensional planar displacement induced between the gratings. In the first stage we give a comprehensive mathematical approach for the analysis of fringe patterns. Then we suggest a fast computational measurement algorithm that uses a Fourier transformation technique. Finally, our experimental results prove that a measuring accuracy of 0.01 µm can be achieved with this method.
我们研究了两个同心圆光栅的莫尔条纹图案，目的是测量光栅之间产生的相对二维平面位移。在第一阶段，我们给出了一种用于分析条纹图案的综合数学方法。然后，我们提出了一种使用傅里叶变换技术的快速计算测量算法。最后，我们的实验结果证明，用这种方法可以达到0.01微米的测量精度。
