Duparré M, Golub M A, Lüdge B, Pavelyev V S, Soifer V A, Uspleniev G V, Volotovskii S G
Appl Opt. 1995 May 10;34(14):2489-97. doi: 10.1364/AO.34.002489.
A full cycle was realized of the photolithographic development and detailed testing of a diffractive optical element that transforms the diverging Gaussian beams of CO(2) lasers into a uniformly filled-in rectangle. The zone feature size of the beam shaper, the diffractive efficiency and accuracy, the focus depth, and the stability with respect to the size and the divergence of incident Gaussian beams are studied by computer modeling. Calculated flattop intensity distributions are presented in the same form of gray-level pictures and three-dimensional plots as the corresponding results measured by an IR camera.
实现了一个完整周期的光刻显影，并对一种衍射光学元件进行了详细测试，该元件可将二氧化碳激光器的发散高斯光束转换为均匀填充的矩形光束。通过计算机建模研究了光束整形器的区域特征尺寸、衍射效率和精度、焦深以及相对于入射高斯光束尺寸和发散度的稳定性。计算得到的平顶强度分布以与红外相机测量的相应结果相同的灰度图片和三维图形式呈现。
