Yoon G Y, Jitsuno T, Nakatsuka M, Nakai S
Appl Opt. 1996 Jan 1;35(1):188-92. doi: 10.1364/AO.35.000188.
A new plastic microlens array, consisting of 900 lenslets, has been developed for the Shack Hartmann wave-front sensor.The individual lens is 300 µm × 300µm and has a focal length of 10 mm, which provides the same focal size, 60 µm in diameter, with a constant peak intensity. One can improve thewave-front measurement accuracy by reducing the spot centroiding error by averaging a few frame memories of an image processor. A deformable mirror for testing the wave-front sensor gives anappropriate defocus and astigmatism, and the laser wave front is measured with a Shack Hartmann wave-front sensor. The measurement accuracy and reproducibility of our wave-front sensor are better than λ/20 and λ/50 (λ = 632.8 nm),respectively, in rms.
一种由900个微透镜组成的新型塑料微透镜阵列已被开发用于夏克-哈特曼波前传感器。单个透镜尺寸为300 µm×300µm，焦距为10 mm，其提供相同的焦斑尺寸，直径为60 µm，且峰值强度恒定。通过对图像处理器的几帧存储器进行平均来减少光斑质心误差，从而提高波前测量精度。用于测试波前传感器的可变形镜会产生适当的离焦和像散，并用夏克-哈特曼波前传感器测量激光波前。我们的波前传感器的测量精度和可重复性在均方根值方面分别优于λ/20和λ/50（λ = 632.8 nm）。
