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无定形三元嵌段共聚物和均聚物的非对称共混物的图形外延组装。

Graphoepitaxial assembly of asymmetric ternary blends of block copolymers and homopolymers.

机构信息

Department of Chemical and Biological Engineering, University of Wisconsin, Madison, WI 53706, USA.

出版信息

Nanotechnology. 2010 Dec 10;21(49):495301. doi: 10.1088/0957-4484/21/49/495301. Epub 2010 Nov 11.

DOI:10.1088/0957-4484/21/49/495301
PMID:21071827
Abstract

Ternary blends of cylinder-forming polystyrene-block-poly(methyl methacrylate) block copolymers and polystyrene and poly(methyl methacrylate) homopolymers were assembled in trench features of constant width. Increasing the fraction of homopolymer in the blend increased the spacing and size of block copolymer domains, which were oriented perpendicular to the substrate to form a hexagonal lattice within the trench. The number of rows of cylinders within the trench was controlled by the blend composition. Depending on the domain size and spacing, the hexagonal lattice was stretched or compressed perpendicular to the trench walls but not perturbed parallel to the walls, indicating a decoupling of the perturbation in the perpendicular and parallel directions. The row spacing was uniform across the trench as a function of position from the trench wall. The results are compared with an analytical model and with Monte Carlo simulations.

摘要

无规共聚物和均聚物的三元共混物被组装在具有恒定宽度的沟槽中。共混物中均聚物分数的增加会增加嵌段共聚物畴的间距和尺寸,这些畴垂直于基底排列,在沟槽内形成六方晶格。沟槽内圆柱的行数由共混物组成控制。根据畴尺寸和间距,六方晶格沿垂直于沟槽壁的方向被拉伸或压缩,但沿平行于沟槽壁的方向不受干扰,表明在垂直和平行方向上的扰动是解耦的。行间距作为沟槽壁位置的函数在整个沟槽中是均匀的。结果与分析模型和蒙特卡罗模拟进行了比较。

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