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由溶胶-凝胶法制备的聚乙烯吡咯烷酮/SiO₂复合材料制造通道波导

Fabrication of channel waveguides from sol-gel-processed polyvinylpyrrolidone/ SiO(2) composite materials.

作者信息

Yoshida M, Prasad P N

出版信息

Appl Opt. 1996 Mar 20;35(9):1500-6. doi: 10.1364/AO.35.001500.

DOI:10.1364/AO.35.001500
PMID:21085265
Abstract

Sol-gel-processed composite materials of polyvinylpyrrolidone (PVP) and SiO(2) were studied for optical waveguide applications. PVP is a polymer that can be crosslinked, so it is expected to have high thermal stability after crosslinking. However, thermal crosslinking and thermal decomposition of pure PVP take place around the same temperature, 200 °C, therefore pure PVP had a high optical propagation loss as a result of the absorption of the decomposed molecules after crosslinking. The incorporation of sol-gel-processed SiO(2) prevented the thermal decomposition of PVP and provided remarkably low optical propagation losses. The PVP/SiO(2)composite material also produced thick (>2-µm) crack-free films when the PVP concentration was 50% or higher. An optical propagation loss of 0.2 dB/cm was achieved at 633 nm in the 50% PVP/SiO(2) composite planar waveguide. Several aspects of the thermal stability of the waveguides were evaluated. The slab waveguide was then used for fabrication of channel waveguides with a selective laser-densification technique. This technique used metal lines fabricated with photolithography on the slab waveguide as a light absorbent, and these metal lines were heated by an Ar laser. The resultant channel waveguide had an optical propagation loss of 0.9 dB/ cm at 633 nm. This technique provides lower absorption loss and scattering loss compared with the direct laser-densification technique, which uses UV lasers, and produces narrow waveguides that are difficult to fabricate with a CO(2) laser.

摘要

研究了通过溶胶-凝胶法制备的聚乙烯吡咯烷酮(PVP)与二氧化硅(SiO₂)复合材料在光波导中的应用。PVP是一种可交联的聚合物,因此预计交联后具有高的热稳定性。然而,纯PVP的热交联和热分解在大约相同的温度200℃下发生,因此由于交联后分解分子的吸收,纯PVP具有高的光传播损耗。溶胶-凝胶法制备的SiO₂的加入防止了PVP的热分解,并提供了极低的光传播损耗。当PVP浓度为50%或更高时,PVP/SiO₂复合材料还能制备出厚度大于2μm的无裂纹薄膜。在50%PVP/SiO₂复合平面光波导中,633nm处的光传播损耗达到0.2dB/cm。评估了光波导热稳定性的几个方面。然后使用选择性激光致密化技术将平板光波导用于制备通道光波导。该技术使用通过光刻在平板光波导上制备的金属线作为光吸收体,并用氩激光加热这些金属线。所得通道光波导在633nm处的光传播损耗为0.9dB/cm。与使用紫外激光的直接激光致密化技术相比,该技术提供了更低的吸收损耗和散射损耗,并能制备出用二氧化碳激光难以制造的窄光波导。

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