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溶液处理的As2S3硫系玻璃波导的中红外特性

Mid-infrared characterization of solution-processed As2S3 chalcogenide glass waveguides.

作者信息

Tsay Candice, Mujagić Elvis, Madsen Christi K, Gmachl Claire F, Arnold Craig B

机构信息

Department of Electrical Engineering, Princeton University, Princeton, NJ 08544, USA.

出版信息

Opt Express. 2010 Jul 19;18(15):15523-30. doi: 10.1364/OE.18.015523.

Abstract

An etch-free and cost-effective deposition and patterning method to fabricate mid-infrared chalcogenide glass waveguides for chemical sensing applications is introduced. As(2)S(3) raised strip optical waveguides are produced by casting a liquid solution of As(2)S(3) glass in capillary channel molds formed by soft lithography. Mid-IR transmission is characterized by coupling the output of a quantum cascade (QC) laser (lambda = 4.8 microm) into the 40 microm wide by 10 microm thick multi-mode waveguides. Loss as low as 4.5 dB/cm is achieved using suitable substrate materials and post-processing. Optical absorption and surface roughness measurements indicate that the solution-processed films are of sufficient quality for optical devices and are promising for further development of waveguide-based mid-IR elements.

摘要

介绍了一种用于制造化学传感应用的中红外硫属化物玻璃波导的无蚀刻且经济高效的沉积和图案化方法。通过在由软光刻形成的毛细管通道模具中浇铸As(2)S(3)玻璃的液体溶液来制备As(2)S(3)凸起条形光波导。通过将量子级联(QC)激光器(λ = 4.8微米)的输出耦合到40微米宽×10微米厚的多模波导中来表征中红外传输。使用合适的衬底材料和后处理可实现低至4.5 dB/cm的损耗。光吸收和表面粗糙度测量表明,溶液处理的薄膜具有足够的质量用于光学器件,并且对于基于波导的中红外元件的进一步发展很有前景。

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