Mahajan Virendra N, Aftab Maham
The Aerospace Corporation, El Segundo, California 90245, USA.
Appl Opt. 2010 Nov 20;49(33):6489-501. doi: 10.1364/AO.49.006489.
The theory of wavefront analysis of a noncircular wavefront is given and applied for a systematic comparison of the use of annular and Zernike circle polynomials for the analysis of an annular wavefront. It is shown that, unlike the annular coefficients, the circle coefficients generally change as the number of polynomials used in the expansion changes. Although the wavefront fit with a certain number of circle polynomials is identically the same as that with the corresponding annular polynomials, the piston circle coefficient does not represent the mean value of the aberration function, and the sum of the squares of the other coefficients does not yield its variance. The interferometer setting errors of tip, tilt, and defocus from a four-circle-polynomial expansion are the same as those from the annular-polynomial expansion. However, if these errors are obtained from, say, an 11-circle-polynomial expansion, and are removed from the aberration function, wrong polishing will result by zeroing out the residual aberration function. If the common practice of defining the center of an interferogram and drawing a circle around it is followed, then the circle coefficients of a noncircular interferogram do not yield a correct representation of the aberration function. Moreover, in this case, some of the higher-order coefficients of aberrations that are nonexistent in the aberration function are also nonzero. Finally, the circle coefficients, however obtained, do not represent coefficients of the balanced aberrations for an annular pupil. The various results are illustrated analytically and numerically by considering an annular Seidel aberration function.
给出了非圆形波前的波前分析理论,并将其应用于对环形波前分析中使用环形多项式和泽尼克圆形多项式的系统比较。结果表明,与环形系数不同,圆形系数通常会随着展开式中使用的多项式数量的变化而变化。尽管用一定数量的圆形多项式进行的波前拟合与用相应的环形多项式进行的拟合完全相同,但活塞圆形系数并不代表像差函数的平均值,其他系数的平方和也不等于其方差。从四阶圆形多项式展开得到的倾斜、tilt和离焦的干涉仪设置误差与从环形多项式展开得到的误差相同。然而,如果这些误差是从例如11阶圆形多项式展开中获得的,并从像差函数中去除,那么将残余像差函数归零会导致错误的抛光。如果遵循定义干涉图中心并围绕其画圆的常规做法,那么非圆形干涉图的圆形系数并不能正确表示像差函数。此外,在这种情况下,像差函数中不存在的一些高阶像差系数也不为零。最后,无论如何获得的圆形系数都不代表环形光瞳的平衡像差系数。通过考虑环形赛德尔像差函数,对各种结果进行了解析和数值说明。