Harbers G, Kunst P J, Leibbrandt G W
Appl Opt. 1996 Nov 1;35(31):6162-72. doi: 10.1364/AO.35.006162.
A modal phase-reconstruction method for wave-front analysis in lateral shearing interferometry is presented. Pseudo-Zernike polynomial functions describe the differential wave fronts and are related to a Zernike polynomial description of the original wave front. We show that this reconstruction is robust for shear ratios in the range 0.15-0.50. The error propagation properties of this differential Zernike polynomial matrix-inversion method are discussed on the basis of both analysis and simulation. It is concluded that the method allows wave-front analysis with an absolute inaccuracy of 2 mλ rms for diffraction-limited wave fronts and with 1% relative inaccuracy for more strongly aberrated wave fronts.
提出了一种用于横向剪切干涉术中波前分析的模态相位重建方法。伪泽尼克多项式函数描述了差分波前，并与原始波前的泽尼克多项式描述相关。我们表明，这种重建对于0.15 - 0.50范围内的剪切比是稳健的。基于分析和模拟讨论了这种差分泽尼克多项式矩阵求逆方法的误差传播特性。得出的结论是，该方法允许对衍射极限波前进行绝对误差为2 mλ rms的波前分析，对更严重像差的波前进行相对误差为1%的波前分析。
