Deck L
Appl Opt. 1996 Dec 1;35(34):6655-62. doi: 10.1364/AO.35.006655.
A method to reduce the sensitivity of phase-shifting interferometry to external vibrations is described. The returning interferogram is amplitude split to form two series of interferograms, taken simultaneously and with complementary properties, one with high temporal and low spatial resolution and the other with low temporal and high spatial resolution. The high-temporal-resolution data set is used to calculate the true phase increment between interferograms in the high-spatial-resolution data set, and a generalized phase-extraction algorithm then includes these phase increments when the topographical phases in the high-spatial-resolution data set are calculated. The measured topography thereby benefits from the best qualities of both data sets, providing increased vibration immunity without sacrificing high spatial resolution.
本文描述了一种降低相移干涉测量法对外部振动敏感度的方法。返回的干涉图进行幅度分割，形成两组同时采集且具有互补特性的干涉图，一组具有高时间分辨率和低空间分辨率，另一组具有低时间分辨率和高空间分辨率。利用高时间分辨率数据集计算高空间分辨率数据集中干涉图之间的真实相位增量，然后在计算高空间分辨率数据集中的地形相位时，一种广义相位提取算法会纳入这些相位增量。由此测得的地形受益于两组数据集的最佳特性，在不牺牲高空间分辨率的情况下提高了抗振性。
