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低温 EBSD 在冰上:在低气压 SEM 中保持稳定的表面。

Cryogenic EBSD on ice: preserving a stable surface in a low pressure SEM.

机构信息

Alfred Wegener Instit. Polar&Marine Res., Bremerhaven, Germany.

出版信息

J Microsc. 2011 Jun;242(3):295-310. doi: 10.1111/j.1365-2818.2010.03471.x. Epub 2010 Dec 13.

Abstract

Naturally deformed ice contains subgrains with characteristic geometries that have recently been identified in etched surfaces using high-resolution light microscopy (LM). The probable slip systems responsible for these subgrain boundary types can be determined using electron backscattered diffraction (EBSD), providing the etch features imaged with reflected LM can be retained during EBSD data acquisition in a scanning electron microscope (SEM). Retention of the etch features requires that the ice surface is stable. Depending on the pressure and temperature, sublimation of ice can occur. The equilibrium temperature for a low pressure SEM operating at 1 × 10(-6) hPa is about -112°C and operating at higher temperatures causes sublimation. Although charging of uncoated ice samples is reduced by sublimation, important information contained in the etch features are removed as the surface sublimes. We developed a method for collecting EBSD data on stable ice surfaces in a low pressure SEM. We found that operating at temperatures of <-112°C reduced sublimation so that the original etch surface features were retained. Charging, which occurred at low pressures (<1.5 × 10(-6) to 2.8 × 10(-5) hPa) was reduced by defocusing the beam. At very low pressures (<1.5 × 10(-6) hPa) the spatial resolution with a defocused beam at 10 kV was about 3 μm in the x-direction at -150°C and 0.5 μm at -120°C, because at higher temperature charging was less and only a small defocus was needed to compensate it. Angular resolution was better than 0.7° after orientation averaging. Excellent agreement was obtained between LM etch features and EBSD mapped microstructures. First results are shown, which indicate subgrain boundary types comprised of basal (tilt and twist) and nonbasal dislocations (tilt boundaries).

摘要

天然变形冰包含具有特征几何形状的亚晶粒,这些亚晶粒最近在使用高分辨率光学显微镜(LM)对蚀刻表面进行研究时被识别出来。使用电子背散射衍射(EBSD)可以确定这些亚晶界类型的可能滑移系统,前提是在扫描电子显微镜(SEM)中采集 EBSD 数据时,可以保留用反射 LM 成像的蚀刻特征。保留蚀刻特征要求冰表面稳定。根据压力和温度的不同,冰可能会升华。在 1×10(-6) hPa 的低气压 SEM 中,冰的平衡温度约为-112°C,而在较高温度下会导致升华。虽然升华会减少未镀膜冰样品的带电,但随着表面升华,蚀刻特征中包含的重要信息也会被去除。我们开发了一种在低气压 SEM 中收集稳定冰表面 EBSD 数据的方法。我们发现,在<-112°C 的温度下操作可以减少升华,从而保留原始的蚀刻表面特征。在低气压(<1.5×10(-6) 至 2.8×10(-5) hPa)下,通过使电子束散焦可以减少带电。在非常低的压力(<1.5×10(-6) hPa)下,在-150°C 时用 10 kV 散焦的电子束在 x 方向上的空间分辨率约为 3 μm,在-120°C 时为 0.5 μm,因为在较高温度下带电较少,只需较小的散焦即可补偿。经过取向平均后,角分辨率优于 0.7°。LM 蚀刻特征和 EBSD 映射的微观结构之间得到了极好的一致性。展示了初步结果,表明亚晶界类型包括基面(倾斜和扭转)和非基面位错(倾斜边界)。

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