Department of Electronic Science and Engineering, Kyoto University, Kyoto 615-8510, Japan.
Opt Lett. 2011 Jan 1;36(1):91-3. doi: 10.1364/OL.36.000091.
We design and fabricate ultra-high-quality (Q) photonic nanocavities in a symmetrically glass-clad silicon (Si) two-dimensional (2D) photonic crystal (PhC) structure. We theoretically investigate the dependence of the refractive index of the glass on the Q factors for asymmetric and symmetric structures. We show that the index-symmetric distribution of the glass is a critical factor to realize ultrahigh Q factors for glass-clad 2D PhC structures. We fabricate symmetrically glass-clad Si PhC nanocavities and achieve a record Q factor of 1×10(6), comparable with the highest Q factors of nanocavities in air-bridge structures.
我们设计并制作了超高品质（Q）的光子纳米腔，其位于对称玻璃包层硅（Si）二维（2D）光子晶体（PhC）结构中。我们从理论上研究了玻璃的折射率对非对称和对称结构 Q 因子的依赖性。我们表明，玻璃的指数对称分布是实现超高 Q 因子的玻璃包层 2D PhC 结构的关键因素。我们制作了对称玻璃包层 Si PhC 纳米腔，并实现了创纪录的 Q 因子 1×10(6)，可与空气桥结构中纳米腔的最高 Q 因子相媲美。
