Kang Jin-Ho, Lee ChaBum, Joo Jae-Young, Lee Sun-Kyu
School of Mechatronics, Gwangju Institute of Science and Technology, Buk-gu, Gwangju, South Korea.
Appl Opt. 2011 Feb 1;50(4):460-7. doi: 10.1364/AO.50.000460.
We present the phase-locked loop (PLL)-based metrology concept using lensed fibers for on-machine surface topography measurement. The shape of a single-mode fiber at the endface was designed using an ABCD matrix method, and two designed lensed fibers-the ball type and the tapered type-were fabricated, and the performance was evaluated, respectively. As a result, the interferometric fringe was not found in the case of the ball lensed fiber, but the machined surface could be measured by utilization of autofocusing and intensity methods. On the other hand, a very clear Fizeau interferometric fringe was observed in the case of the tapered lensed fiber. Its performance was compared with the results of the capacitance sensor and a commercially available white-light interferometer. We confirmed that PLL-based surface profile measurement using the tapered and ball lensed fibers can be applied for on-machine surface topography measurement applications.
我们提出了一种基于锁相环（PLL）的计量概念，该概念使用透镜光纤进行机上表面形貌测量。采用ABCD矩阵法设计了单模光纤端面的形状，并制作了两种设计的透镜光纤——球形和锥形，分别对其性能进行了评估。结果，在球形透镜光纤的情况下未发现干涉条纹，但可利用自动聚焦和强度方法测量加工表面。另一方面，在锥形透镜光纤的情况下观察到了非常清晰的斐索干涉条纹。将其性能与电容传感器和市售白光干涉仪的结果进行了比较。我们证实，使用锥形和球形透镜光纤的基于PLL的表面轮廓测量可应用于机上表面形貌测量应用。
