多尺度微透镜阵列的制作与特性分析：具有抗反射和扩散性能

Fabrication and characterization of multi-scale microlens arrays with anti-reflection and diffusion properties.

机构信息

Photonics and Nano-Structure Laboratory, Department of Electrical Engineering and Graduate Institute of Photonics and Optoelectronics, National Taiwan University, Taipei 10617, Taiwan, Republic of China.

出版信息

Nanotechnology. 2011 May 27;22(21):215303. doi: 10.1088/0957-4484/22/21/215303. Epub 2011 Mar 30.

DOI:10.1088/0957-4484/22/21/215303

PMID:21451220

Abstract

In this paper, an effective method for fabricating artificial compound-eye structures is demonstrated. The fabrication of high fill factor microlens arrays (MLAs) with sub-wavelength structures (SWSs) on a polycarbonate (PC) substrate involves nanoimprint and thermo-extrusion techniques by using two different scales of nano/micromolds. In addition, the MLAs with SWSs on the PC substrate would be replicated on a polymethylmethacrylate (PMMA) millimeter concave surface by hot-embossing, forming three-level compound-eye structures. The optical properties of these samples are characterized. The transmittances of two-level PC and three-level PMMA compound structures are increased by 2.5% and 2%, and the uniformities are enhanced by 18% and 24%, respectively.

摘要

本文展示了一种制造人工复眼结构的有效方法。在聚碳酸酯（PC）基底上制造具有亚波长结构（SWS）的高填充因子微透镜阵列（MLAs）涉及纳米压印和热挤压技术，使用两种不同尺度的纳米/微模具。此外，在 PC 基底上具有 SWS 的 MLAs 将通过热压印复制到聚甲基丙烯酸甲酯（PMMA）毫米凹面，形成三级复眼结构。对这些样品的光学性能进行了表征。两级 PC 和三级 PMMA 复合结构的透过率分别提高了 2.5%和 2%，均匀性分别提高了 18%和 24%。