以WO3-Pd复合薄膜为传感材料的侧面抛光光纤布拉格光栅氢气传感器。

Side-polished fiber Bragg grating hydrogen sensor with WO3-Pd composite film as sensing materials.

作者信息

Dai Jixiang, Yang Minghong, Chen Yun, Cao Kun, Liao Hansheng, Zhang Pengcheng

机构信息

National Engineering Laboratory for Optical Fiber Sensors, Wuhan University of Technology, Wuhan, China.

出版信息

Opt Express. 2011 Mar 28;19(7):6141-8. doi: 10.1364/OE.19.006141.

DOI:10.1364/OE.19.006141

PMID:21451638

Abstract

WO3-Pd composite films were deposited on the side-face of side-polished fiber Bragg grating as sensing elements by magnetron sputtering process. XRD result indicates that the WO3-Pd composite films are mainly amorphous. Compared to standard FBG coated with same hydrogen sensitive film, side-polished FBG significantly increase the sensor's sensitivity. When hydrogen concentrations are 4% and 8% in volume percentage, maximum wavelength shifts of side-polished FBG are 25 and 55 pm respectively. The experimental results show the sensor's hydrogen response is reversible, and side-polished FBG hydrogen sensor has great potential in hydrogen's measurement.

摘要

采用磁控溅射工艺，将WO₃-Pd复合薄膜沉积在侧面抛光光纤布拉格光栅的侧面作为传感元件。X射线衍射结果表明，WO₃-Pd复合薄膜主要为非晶态。与涂覆相同氢敏薄膜的标准光纤布拉格光栅相比，侧面抛光光纤布拉格光栅显著提高了传感器的灵敏度。当氢气体积分数分别为4%和8%时，侧面抛光光纤布拉格光栅的最大波长漂移分别为25 pm和55 pm。实验结果表明该传感器的氢响应具有可逆性，侧面抛光光纤布拉格光栅氢传感器在氢气测量方面具有很大潜力。