Ma Wenbo, Li Yuyang, Yang Ning, Fan Li, Chen Yanli, Zhou Xuan, Li Jiaping, Yang Caiqian
College of Civil Engineering and Mechanics, Xiangtan University, Xiangtan 411105, China.
Shandong Institute of Space Electronic Technology, Yantai 264670, China.
Sensors (Basel). 2021 Nov 18;21(22):7657. doi: 10.3390/s21227657.
In this paper, in order to improve the durability of optical fiber grating hydrogen sensors, an optical fiber grating hydrogen sensor with high precision, stability, and durability is prepared. Based on the simplified two-dimensional model and finite element analysis, the effects of film thickness, coating speed, and coating times on the residual Mises equivalent stress between the sensor film and substrate were studied, and the optimum coating parameters were determined. The finite element analysis results show that the residual equivalent stress between the film and the substrate increases with the increase in the film thickness between 50 and 150 nm. The range of 200-250 nm is relatively stable, and the value is small. The coating speed has almost no effect on the residual equivalent stress. When the thickness of the film is 200 nm, the residual equivalent stress decreases with the increase in coating times, and the equivalent force is the lowest when the film is coated three times. The best coating parameters are the thickness of 200 nm, the speed of 62.5 μm/s, and the times of coating three times. The results of finite element analysis are verified by the hydrogen sensitivity test and durability test.
本文为提高光纤光栅氢传感器的耐久性，制备了一种具有高精度、稳定性和耐久性的光纤光栅氢传感器。基于简化二维模型和有限元分析，研究了膜厚、镀膜速度和镀膜次数对传感器薄膜与基底之间残余米塞斯等效应力的影响，并确定了最佳镀膜参数。有限元分析结果表明，在50至150nm之间，薄膜与基底之间的残余等效应力随膜厚增加而增大。200至250nm范围相对稳定，且数值较小。镀膜速度对残余等效应力几乎没有影响。当薄膜厚度为200nm时，残余等效应力随镀膜次数增加而减小，镀膜三次时等效力最低。最佳镀膜参数为膜厚200nm、速度62.5μm/s、镀膜次数三次。有限元分析结果通过氢敏感性测试和耐久性测试得到验证。
