Coherent quasi-cw 153 nm light source at 33 MHz repetition rate.

We present a quasi-cw laser in a vacuum ultraviolet region at megahertz repetition rate. The narrowband pulses generated from an ytterbium-fiber laser system at 33 MHz repetition rate at the central wavelength of 1074 nm are frequency-converted by successive stages of LiB(3)O(5) crystals and KBe(2)BO(3)F(2) crystals. The generated radiation at 153 nm has the shortest wavelength achieved through phase-matched frequency conversion processes in nonlinear optical crystals to our knowledge.