Department of Physics, University of Alberta, Edmonton, Canada.
Micron. 2012 Jan;43(1):2-7. doi: 10.1016/j.micron.2011.05.007. Epub 2011 Jun 12.
We present and discuss measurements of electron-irradiation damage in polystyrene and other polymers, based on fading of the 7-eV energy-loss peak. These measurements suggest a large increase in characteristic dose as the electron-beam diameter is reduced from 1 μm to below 1 nm. This finding is discussed in terms of secondary-electron production and delocalization of the inelastic scattering, both as it affects the volume of specimen in which the energy is deposited and the volume giving rise to the inelastic signal used to assess the damage.
我们提出并讨论了基于 7 电子伏能量损失峰衰减的聚苯乙烯和其他聚合物的电子辐照损伤测量结果。这些测量结果表明,随着电子束直径从 1 微米减小到 1 纳米以下,特征剂量大幅增加。这一发现是根据二次电子产生和非弹性散射的离域来讨论的,这两个因素都会影响能量沉积的试样体积以及产生用于评估损伤的非弹性信号的体积。