Abdelsalam D G, Magnusson Robert, Kim Daesuk
Division of Mechanical System Engineering, Chonbuk National University, Jeonju 561-756, South Korea.
Appl Opt. 2011 Jul 1;50(19):3360-8. doi: 10.1364/AO.50.003360.
We describe what we believe to be a new digital holographic configuration that can be utilized for both single-shot, dual-wavelength, off-axis geometry and imaging polarimetry. To get the feasibility of the single-shot, dual-wavelength, off-axis geometry, a sample with a nominal step height of 1.34 μm is used. Undesirable noises that strongly affect the measurement have been suppressed successfully by using a modified flat fielding method for the dual-wavelength scheme. And also, the experiment is conducted on a nanopattern sample on the basis of a single image acquisition to show the imaging polarimetry capability. The proposed scheme can provide a real-time solution for measuring three-dimensional objects having a high abrupt height difference with moderate accuracy. Furthermore, it can be used as a fast polarization imaging measurement tool.
我们描述了一种我们认为是全新的数字全息配置，它可用于单次、双波长、离轴几何结构和成像偏振测量。为了验证单次、双波长、离轴几何结构的可行性，使用了标称台阶高度为1.34μm的样品。通过对双波长方案采用改进的平场校正方法，成功抑制了对测量有强烈影响的不良噪声。此外，基于单次图像采集在纳米图案样品上进行了实验，以展示成像偏振测量能力。所提出的方案能够以适度的精度为测量具有高陡度高度差的三维物体提供实时解决方案。此外，它还可以用作快速偏振成像测量工具。
