Yuan Wu, Wang Fei, Savenko Alexey, Petersen Dirch Hjorth, Bang Ole
Department of Photonics Engineering, Technical University of Denmark, DK-2800 Kgs. Lyngby, Denmark.
Rev Sci Instrum. 2011 Jul;82(7):076103. doi: 10.1063/1.3608111.
We introduce a highly compact fiber-optic Fabry-Pérot refractive index sensor integrated with a fluid channel that is fabricated directly near the tip of a 32 μm in diameter single-mode fiber taper. The focused ion beam technique is used to efficiently mill the microcavity from the fiber side and finely polish the end facets of the cavity with a high spatial resolution. It is found that a fringe visibility of over 15 dB can be achieved and that the sensor has a sensitivity of ~1731 nm/RIU (refractive index units) and a detection limit of ~5.78 × 10(-6) RIU. This miniature integrated all-in-fiber optofludic sensor may find use in minimal-invasive biomedical applications.
我们介绍了一种高度紧凑的光纤法布里-珀罗折射率传感器，该传感器集成了一个流体通道，该流体通道直接在直径为32μm的单模光纤锥尖附近制造。聚焦离子束技术用于从光纤侧面高效铣削微腔，并以高空间分辨率精细抛光腔的端面。结果发现，可以实现超过15dB的条纹可见度，并且该传感器的灵敏度约为1731nm/RIU（折射率单位），检测限约为5.78×10(-6)RIU。这种微型集成全光纤光流体传感器可用于微创生物医学应用。
