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利用半透明聚苯乙烯球体和248纳米激光脉冲在硅上制备的有机纳米结构。

Organic nanostructures on silicon, created with semitransparent polystyrene spheres and 248 nm laser pulses.

作者信息

Rothe Erhard W, Baird Ronald J, Manke Charles W, Piparia Reema

机构信息

Department of Chemical Engineering and Materials Science, Wayne State University, Detroit, MI 48202, USA.

出版信息

Nanotechnology. 2008 Apr 23;19(16):165301. doi: 10.1088/0957-4484/19/16/165301. Epub 2008 Mar 18.

Abstract

Arrays of nanostructures are made starting with a template of close-packed, polystyrene spheres on a silicon surface. The spheres are either 1.091 or 2.99 µm in diameter (d) and are of polystyrene (PS). They are irradiated with a pulse of either 308 or 248 nm light to which they are transparent and semitransparent, respectively. A transparent sphere with d = 1.091 µm diameter concentrates incident light onto a small substrate area. As has been previously reported, that creates silicon nanobumps that rise from circular craters. At 248 nm and d = 2.99 µm, the light energy is mainly absorbed, destroys the sphere, and leaves a shrunken mass (typically about 500 nm wide and 100 nm high) of organic material that is probably polystyrene and its thermal degradation products. At 248 nm and d = 1.091 µm, the residual organic structures are on the order of 300 nm wide and 100 nm high. A distinctive feature is that these organic structures are connected by filaments that are on the order of 50 nm wide and 10 nm high. Filaments form because the close-packed PS spheres expand into each other during the early part of the laser pulse, and then, as the main structures shrink, their viscoelasticity leads to threads between them. Our results with 248 nm and d = 1.091 µm differ from those described by Huang et al with 248 nm and d = 1.0 µm. Future studies might include the further effect of wavelength and fluence upon the process as well the use of other materials and the replacement of nanospheres by other focusing shapes, such as ellipsoids or rods.

摘要

纳米结构阵列是从硅表面紧密堆积的聚苯乙烯球体模板开始制备的。这些球体的直径(d)为1.091或2.99微米,由聚苯乙烯(PS)制成。它们分别被波长为308或248纳米的脉冲光照射,对这些光它们分别是透明和半透明的。直径d = 1.091微米的透明球体将入射光聚集到一个小的基底区域上。如先前报道的那样,这会产生从圆形坑中升起的硅纳米凸块。在248纳米和d = 2.99微米时,光能主要被吸收,球体被破坏,留下一团收缩的物质(通常约500纳米宽、100纳米高),其可能是聚苯乙烯及其热降解产物。在248纳米和d = 1.091微米时,残留的有机结构约为300纳米宽、100纳米高。一个显著特征是这些有机结构由宽度约为50纳米、高度约为10纳米的细丝连接。细丝的形成是因为紧密堆积的聚苯乙烯球体在激光脉冲的早期相互膨胀,然后,随着主要结构收缩,它们的粘弹性导致它们之间形成细丝。我们在248纳米和d = 1.091微米时的结果与Huang等人在248纳米和d = 1.0微米时所描述的结果不同。未来的研究可能包括波长和能量密度对该过程的进一步影响,以及使用其他材料和用其他聚焦形状(如椭球体或棒体)替代纳米球体。

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