Li Huaqing, Wu Nianqiang
Department of Mechanical and Aerospace Engineering, WV Nano Initiative, West Virginia University, PO Box 6106, Morgantown, WV 26506, USA.
Nanotechnology. 2008 Jul 9;19(27):275301. doi: 10.1088/0957-4484/19/27/275301. Epub 2008 May 27.
Two-dimensional (2D) nanostructure patterns have extensive applications in photonic devices, nanoelectronics, electrochemical devices, biosensors, catalysts and high-density magnetic recording devices. It remains a challenge to develop low-cost, high-throughput, high-resolution techniques for the fabrication of large-area (wafer-scale) 2D nanostructure array patterns with controlled feature size, shape and pitch. The present work has demonstrated a low-cost, high-throughput, high-resolution approach for the fabrication of large-area, high-quality nanostructure array patterns by nanosphere lithography combined with electroplating. The gold hemisphere array pattern obtained is capable of functioning as a nanoelectrode array (NEA) in which the gold hemispheres act as individual electrodes that are separated with an insulating polypyrrole (PPY) film. Cyclic voltammetry measurement has shown a sigmoid-shaped voltammogram, which is characteristic of electrochemical characteristics of a nanoelectrode array. NEAs are expected to find extensive applications in fundamental electrochemistry studies and electrochemical devices.
二维（2D）纳米结构图案在光子器件、纳米电子学、电化学器件、生物传感器、催化剂和高密度磁记录器件等方面有着广泛的应用。开发低成本、高通量、高分辨率的技术来制造具有可控特征尺寸、形状和间距的大面积（晶圆级）二维纳米结构阵列图案仍然是一项挑战。目前的工作展示了一种通过纳米球光刻与电镀相结合来制造大面积、高质量纳米结构阵列图案的低成本、高通量、高分辨率方法。所获得的金半球阵列图案能够用作纳米电极阵列（NEA），其中金半球充当由绝缘聚吡咯（PPY）膜隔开的单个电极。循环伏安法测量显示出S形伏安图，这是纳米电极阵列电化学特性的特征。预计纳米电极阵列将在基础电化学研究和电化学器件中得到广泛应用。
