Cannara Rachel J, Gotsmann Bernd, Knoll Armin, Dürig Urs
IBM Zürich Research Laboratory, Säumerstrasse 4, CH-8803 Rüschlikon, Switzerland.
Nanotechnology. 2008 Oct 1;19(39):395305. doi: 10.1088/0957-4484/19/39/395305. Epub 2008 Aug 18.
Future applications for parallel probes, including probe-based data storage and probe lithography, demand that probe technologies achieve patterning rates in the megahertz per probe range at feature sizes below 30 nm, i.e. ∼1 Tbit in(-2). If thermo-mechanical indentation of polymers is employed, some uncertainty remains as to whether the physics governing the indentation kinetics at these short timescales permits the fast indentation processes required. We demonstrate the feasibility of using polymer media for thermo-mechanical probe storage or lithography, at sliding speeds of 15 mm s(-1) and sub-microsecond indentation times, which fall into this previously untapped regime.
包括基于探针的数据存储和探针光刻在内的并行探针的未来应用，要求探针技术在特征尺寸低于30纳米时达到每探针兆赫兹级别的图案化速率，即约1太比特每平方英寸。如果采用聚合物的热机械压痕，在这些短时间尺度下控制压痕动力学的物理原理是否允许所需的快速压痕过程仍存在一些不确定性。我们证明了在15毫米每秒的滑动速度和亚微秒级压痕时间下使用聚合物介质进行热机械探针存储或光刻的可行性，这些速度和时间属于此前未开发的范围。
